Contracts Finder notice
202122/547 Supply of up to four dry etch and deposition systems
Authority: University of Leeds
CPV: Dry-etching equipment (22520000)
Published contract value£2,155,581Exc. VAT
Contract ends 10 Dec 2026
Awarded to Oxford Instruments
Contract starts 10 Dec 2023
What is being bought
Published requirement descriptionNOTICE OF AWARD OF four dry etch and deposition systems, specifically:
- A Deep-Silicon Reactive Ion Etcher (D-RIE)
- An Inductively Coupled Plasma-RIE (ICP-RIE)
- A parallel plate RIE
- A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)
Published procurement details
- Procedure
- Negotiated procedure
- Buyer reference
- BIP804651228
- Category
- Goods
- Tender status
- Complete
- Award status
- Active
- Suitable for SMEs
- No
- Suitable for voluntary, community and social enterprises
- No
- Tender deadline
- Procurement method
- Selective
- Item 1: Delivery locations as published
- Yorkshire and the Humber, United Kingdom
Key dates
Published dates- Award decision26 May 2023
- Notice published24 Aug 2023
- Contract starts10 Dec 2023
- Contract ends10 Dec 2026
Contracting authority & participating public bodies
- University of LeedsContracting authority
Suppliers named on the notice
- Oxford InstrumentsSupplier
- Business size
- Large
Official documents & specifications (2)
Official links; attachments are not copiedNotices published for this procedure
Source record
- Source
- Contracts Finder
- Notice language
- en
- Release reference
- ocds-b5fd17-c2282e97-5c3a-4d19-90c0-1fe82ba6b29e-2023-08-24T10:45:04+01:00
- Published
- 24 Aug 2023
- Latest update
- 24 Aug 2023
- Procedure reference
- ocds-b5fd17-c2282e97-5c3a-4d19-90c0-1fe82ba6b29e
- Contract reference
- ocds-b5fd17-c2282e97-5c3a-4d19-90c0-1fe82ba6b29e-1