Official UK procurement notice
School of Physics & Astronomy: Inductively Coupled Plasma Reactive-Ion Etching System
Authority: University of St Andrews (Education)
What is being bought
Published requirement descriptionThe School of Physics & Astronomy is seeking to enhance its research and teaching activity through the acquisition of an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system.
CPV: Dry-etching equipment · Parts of air or vacuum pumps, of air or gas compressors · Vacuum pumps
The lotProcurement structure
single lot · no lot value publishedLot #1We require an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system for…Awarded
We require an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system for high quality etching (high etch rates, side wall angle control and low sidewall roughness) of
- silicon,
- silicon compounds (e.g. SiC, Si3N4),
- compound III-V & compound II-VI semiconductors (e.g. AlGaInP, InGaP, AlGaAs, InP, GaAs, GaN, etc.),
- dielectrics (e.g. ZnO2, TiO, ITO, Al2O3, ZrO2, etc.),
- metals (e.g. Cr, Al, Ti, Au, W, Pt, etc.) and
- organics (e.g. resists like SU8, S1818, etc and polymers like parylene, PS etc)
containing an inductively coupled plasma (ICP) source for the generation of plasmas with high ion density, low ion energy and narrow energy distribution (ion energy and ion density are separately controllable via an included bias generator).
The ICP-RIE etcher should be fully clean room-compatible. Wafers should be loaded into the etching chamber via a vacuum load lock for process stability, short process cycle times and safety issues. The substrate electrode should be He back-side cooled for dynamic, direct and very efficient temperature control of the substrate in a range of -20 °C to 150 °C, which may require the attachment of an external chiller (to be included in quotation). The etcher should be equipped with a laser interferometer to allow for live detection of the etching progress, and optionally also with an optical emission spectrometer for monitoring of chamber condition. The etcher should be compatible with fluorinated and chlorinated gases. The entire system should be operated from a PC (to be included in delivery). Additional information: All Tenders for the University of St Andrews are administered through our e-Tendering System (InTend). To Express an Interest please go to our tender website at: intendhost.co.uk/universityofstandrews ↗
Please note that 'Notes of Interest' placed via PCS (Public Contracts Scotland) are not automatically accepted.
What it takes to wini
How this buyer will score bids.
The evaluation criteria and weights exactly as published on the notice, grouped by family (price, quality, social value and so on).
Evaluation split and conditions of participation as published; the tender pack may add morei
How this buyer will score bids.
The evaluation criteria and weights exactly as published on the notice, grouped by family (price, quality, social value and so on).
Published sub-criteria (2)
- Quality: 65%
- Cost: 35%
Published award criteria (2)
- Quality: 65
- Cost: 35
- Staff
- Names and qualifications of delivery staff must be submitted
- Price carries 35 of 100 points: a 10% discount moves about 3.5 points. The method statement decides this lot, not the discount.
Price arithmetic assumes straight proportional scoring; the tender pack may use another formula.
Procedure terms & legal framework
From the official record · publisher note attached- Procedure method
- Open procedure
- Legal basis
- CELEX · 32014L0024 Public Contracts Regulations 2015 (Directive 2014/24/EU)
- Procurement category
- Goods
- Notice status
- Awarded
- Procurement threshold
- Unspecified in notice
- Regulatory regime
- Standard
- Commercial structure
- Stand-alone contract (no framework)
- Competition type
- Competitive procedure
- GPA / WTO covered
- Yes (GPA)
- Recurring procurement
- No (one-off requirement)
- First published
- 22 Jan 2021, 15:16 GMT
- Last source update
- 1 Jun 2021, 12:04 BST
- Award evaluation window
- 24 Feb 2021 – …
- Authority reference
PHA/220121/AD/SL- FTS notice number
2021/S 000-012163- Classification (CPV)
- Delivery area
- Official registry OCID
ocds-h6vhtk-028ca4Find a Tender
- Electronic trading
- e-invoicing allowed · electronic ordering · electronic payment
- Review procedure
The University of St Andrews will incorporate a minimum of 10 calendar day standstill period at the point of information on the award of the contract being communicated to tenderers. This period allows unsuccessful tenderers to seek further debriefing from the contracting authority before the contract is entered into. Applicants have 2 working days from the notification of the award decision to request additional debriefing and that information has to be provided a minimum of 3 working days before the expiry of the standstill period. Such additional information should be requested from The University of St Andrews.
If an appeal regarding the award of contract has not been successfully resolved The Public Contracts (Scotland) Regulations 2012 provide for aggrieved parties who have been harmed or are at risk of harm by a breach of the rule to take action in the Sheriff Court or Court of Session.
The anticipated review body in such cases would be:
Dundee Sheriff Court
6 West Bell Street
Dundee
DD1 9AD
Telephone: +44 1382 229 961
Anyone bringing court proceedings against the University of St Andrews must inform the University of St Andrews in advance of the alleged breach and its intention to bring proceedings. Any such action must be brought within 15 days of the date on which a decision is sent to them or published to challenge that decision.
Proceedings seeking an ineffectiveness order must be brought within 30 days of the publication of the contract award notice in the OJEU, or 30 days from the date of a decision letter to all tenderers concerned, and any candidates concerned, containing a summary of the reason for the recipient being unsuccessful, otherwise 6 months from the date of entering into the contract or concluding the framework agreement.
Where a contract has not been entered into the Court may, by interim order, suspend the procurement procedure. The court may also set aside a decision or actions taken by the University or order it to amend and document; and/or award damages. However, by express requirement the court may decide not to grant an interim order when the negative consequences of such an order are likely to outweigh the benefits, having regard to a number of considerations.
If the contract has been entered into the Court may, depending on the nature of the breach: make an ineffectiveness order; impose a financial penalty; shorten the duration of the contract; make any other order considered appropriate to address the consequences of ineffectiveness or shortening the duration or the contract; award damages.
Publisher note: All tenders for the University of St Andrews are administered through our eTendering System (InTend). To Express an Interest please go to our tender website at: https://intendhost.co.uk/universityofstandrews. Please note that 'Notes of Interest' placed via PCS (Public Contracts Scotland) are not automatically accepted. (SC Ref:655776)
How it was run
Official noticeTender documents are also served through a separate tool: https://in-tendhost.co.uk/universityofstandrews ↗
- Submission deadline
- 24 Feb 2021, 12:00 GMT
- Submission channel
- {"electronicSubmission"}
- Accepted languages
- en
- Participation fee
- document
- Bid validity
- 90 days from the deadline
- Bids opened
- 24 Feb 2021, 12:00 GMT
Timeline
24 Feb 2021 → 1 Jun 2021 · 3 dates- Submission deadline24 Feb 2021, 12:00 GMT
- Bids opened24 Feb 2021, 12:00 GMT
- Notice published1 Jun 2021, 12:04 BST
Notice history
1 event · 2 releases on Find a Tender- Status changed to complete1 Jun 2021, 12:04 BST
Commercial outcome & contract awards
Published awards, contracts and bid statistics, not a forecast| Awarded to | Value | Date | Status |
|---|---|---|---|
| SENTECH Instruments GmbHSME | £273,125 † | — | Awarded |
Contracts
Contract 012163-2021-PHA/220121/ADF/SL-1 · SENTECH Instruments GmbHSME
- Signed
- 25 May 2021
- Value
- £273,125
- Status
- active
Bid statistics published by the authority
| Bids | SME | VCSE | Valid bid range |
|---|---|---|---|
| 3bids · 3 electronic · 3 from abroad | 3 | — | — |
Contracting authority & participating public bodies
Dispute resolution & review bodies
- Dundee Sheriff CourtReview body
Bidders & participating suppliers
1 commercial party on the notice- SENTECH Instruments GmbHAwarded supplier
Official documents & specifications (2)
Official links; attachments are not copiedTender pack and attachments
- Economic and financial selection criteria
- Technical selection criteria